handbook of physical vapor deposition pvd processing materials science and process technology

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Handbook Of Physical Vapor Deposition Pvd Processing

Author : D. M. Mattox
ISBN : 0080946585
Genre : Technology & Engineering
File Size : 47. 76 MB
Format : PDF
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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories,"" to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook Of Physical Vapor Deposition Pvd Processing

Author : Donald M. Mattox
ISBN : 9780815517634
Genre : Technology & Engineering
File Size : 76. 17 MB
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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Materials Science Of Thin Films

Author : Milton Ohring
ISBN : 9780125249751
Genre : Science
File Size : 89. 82 MB
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This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.

The Foundations Of Vacuum Coating Technology

Author : D. M. Mattox
ISBN : 9780815519270
Genre : Technology & Engineering
File Size : 45. 91 MB
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The Foundations of Vacuum Coating Technology is a concise review of the developments that have led to the wide variety of applications of this technology. This book is a must have for materials scientists and engineers working with vacuum coating in the invention of new technologies or applications in all industries. With over 370 references, this is an excellent starting point for those who don't want to reinvent the wheel. In particular, the book is a valuable reference for those interested in researching proposed or existing patents. This unique book provides a starting point for more in-depth surveys of past and recent work in all aspects of vacuum coating. The author uses his extensive knowledge of the subject to draw comparisons and place the information into the proper context. This is particularly important for the patent literature where the terminology does not always match industry jargon. A section of acronyms for vacuum coating and glossary of terms at the end of the book are critical additions to the information every reader needs.

Electrochemical Dictionary

Author : Allen J. Bard
ISBN : 9783540745983
Genre : Science
File Size : 87. 12 MB
Format : PDF
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This awesome achievement provides up-to-date, wide-ranging and authoritative coverage of the specific terms most used in electrochemistry and its related fields, including relevant areas of physics and engineering. This modern compendium will be an indispensable source of information for scientists, engineers, and technical staff active in all fields of electrochemistry. Containing almost 3,000 entries, its unsurpassed authority derives from the fact that the contributions come from a distinguished panel of eminent electrochemists. Each entry supplies a clear and precise explanation of the term and provides references to the most useful reviews, books and original papers to enable readers to pursue a deeper understanding if so desired.

Handbook Of Thin Film Deposition Processes And Techniques

Author : Krishna Seshan
ISBN : 9780815517788
Genre : Technology & Engineering
File Size : 63. 27 MB
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New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook Of Deposition Technologies For Films And Coatings

Author : Peter M. Martin
ISBN : 9780815520320
Genre : Technology & Engineering
File Size : 36. 58 MB
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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

Introduction To Nanoscience And Nanotechnology

Author :
ISBN : UCSC:32106019857181
Genre : Science
File Size : 36. 47 MB
Format : PDF
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The maturation of nanotechnology has revealed it to be a unique and distinct discipline rather than a specialization within a larger field. Its textbook cannot afford to be a chemistry, physics, or engineering text focused on nano. It must be an integrated, multidisciplinary, and specifically nano textbook. The archetype of the modern nano textbook, Introduction to Nanoscience and Nanotechnology builds a solid background in characterization and fabrication methods while integrating the physics, chemistry, and biology facets. The remainder of this color text focuses on applications, examining engineering aspects as well as nanomaterials and industry-specific applications in such areas as energy, electronics, and biotechnology. Also available in two course-specific volumes: Introduction to Nanoscience elucidates the nanoscale along with the societal impacts of nanoscience, then presents an overview of characterization and fabrication methods. The authors systematically discuss the chemistry, physics, and biology aspects of nanoscience, providing a complete picture of the challenges, opportunities, and inspirations posed by each facet before giving a brief glimpse at nanoscience in action: nanotechnology. Fundamentals of Nanotechnology surveys the field’s broad landscape, exploring the physical basics such as nanorheology, nanofluidics, and nanomechanics as well as industrial concerns such as manufacturing, reliability, and safety. The authors then explore the vast range of nanomaterials and systematically outline devices and applications in various industrial sectors. Qualifying instructors who purchase either of these volumes (or the combined set) are given online access to a wealth of instructional materials. These include detailed lecture notes, review summaries, slides, exercises, and more. The authors provide enough material for both one- and two-semester courses.

Thin Films

Author :
ISBN : UCLA:L0078408333
Genre : Thin films
File Size : 69. 35 MB
Format : PDF, Mobi
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Handbook Of Thin Film Deposition

Author : Krishna Seshan
ISBN : 9781437778731
Genre : Technology & Engineering
File Size : 48. 74 MB
Format : PDF, Mobi
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Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

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